Micro Electro-Mechanical Systems (MEMS) :: essays research papers

Micro Electro-Mechanical Systems Micro Electro-Mechanical Systems (MEMS) is the integration of robot alike(p) elements, sensors, actuators and electronics on a common silicon substratum break microfabrication techniques. MEMS argon a warming area of research because they integrate sensing, analyzing and responding on the same silicon substrate hence promising realization of complete systems-on-a-chip. As MEMS are fabricate using batch fabrication techniques similar to IC technology, MEMS are evaluate to deliver high functionality at low prices.Current systems are bound by the capability of sensors and actuators, as these are bulkier and less reliable than the microelectronic circuit. In a MEM system the sensors act as the eyes and fulfill data about the environment. The microelectronic circuit, which is the brain, processes the data and accordingly controls the mechanically skillful systems, the arms of the MEMS, to modify the environment suitably. The electronics on the MEM S are manufactured using IC techniques while micro machining techniques are used to produce the mechanical and electromechanical parts. MEMS FabricationThere are number of methods to fabricate MEMS like silicon bob up micromachining, silicon bulk machining, electro discharge machining, LIGA (in German, Lithographie, Galvanoformung(Electro Plating), Abformung(Injection Moulding)) .Only silicon surface micromachining is discussed here.Silicon Surface MicromachiningSilicon surface micromachining uses the same equipment and processes as the electronics semiconductor device industry. There are three basic make blocks in this technology, which are the ability to deposit thin films of material on a substrate, to apply a patterned mask on top of the films by photolithographic imaging, and to etch the films selectively to the mask. A MEMS process is usually a structured while of these operations to form actual devices. 1. Deposition Processes One of the basic building blocks in MEMS pro cessing is the ability to deposit thin films of material. This is achieved either through and through the processes like PVD or CVD.2. Lithography Lithography in the MEMS context is typically the transfer of a pattern to a light-sensitive material by selective video to a radiation source such as light. In lithography for micromachining, the photosensitive material used is typically a photoresist. When resist is exposed to a radiation source of a specific a wavelength, the chemical opponent of the resist to developer solution changes.3. Etching If the resist is placed in a developer solution after selective exposure to a light source, it leave etch aside one of the two regions (exposed or unexposed). Then some other layer of material is deposited and the first layer selectively etched away as shown in the figure resulting in the required MEMS.